The Veritasium video is good but their "newscast" style with constant back-and-forth cuts to talking heads can make the presentation a bit disjointed.

The more straightforward video of ASML EUV is from Branch Education: https://www.youtube.com/watch?v=B2482h_TNwg

Because that vid gives an overview of the whole machine, it gives context to what each scientist is talking about in the Veritasium interviews.

Great video and I think the only way to truly grasp the complexity of EUV lithography as a layman.