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From 1999 - https://www.eetimes.com/u-s-gives-ok-to-asml-on-euv-effort/

"U.S. Undersecretary of Energy Ernest Moniz said, “if the EUV technology proves viable, ASML has agreed to build a factory in the U.S., similar to its Netherlands facility, as well as to establish an American research and development center. The factory will supply 100 percent of all ASML's sales in the United States.”"

Minoz said ASML has “agreed to help facilitate periodic reviews among the Euclides EUV program members and U.S. manufacturers.” Euclides is a Europe-based research effort supported by the European Community and based primarily at ASML's R&D facilities in Eindhoven. “Collaborative participation on a pre-competitive basis among these leading lithography tool suppliers is the best approach for strengthening the overall technology and assuring its international acceptance,”